Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Liquid crystal glass transfer robot (main unit)
SR8665
NIDEC INSTRUMENTS CORPORATION
Nidec Sankyo's industrial robots utilize our own servo motors and device cotrolling software to suppress vibration,to realize stable and fast handling under highly clean environment.
- characteristics:
- ・Possible to do parallel acccess motion, by moving S-axis, TH2-axis, TH1-axis, and Z-axis independently from each other.・Possible to accommondate any chamber layout, and contributing to high design flexibility.・Easy heat countermeasure to the drive unit due to atmospheric environment up to 1stArm.・Not only glass substrate, but also possible to handle heavy mask.・Possible to support Facedown glass handling by laying out hand pads on the substrate circumference.・Reduced grease outgassing by reducing arm joint bearing.・Possible to add substrate presence sensor for vacuum environment use, as optoin.
- Contact information for product inquiry
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Product data
Basic information
| Vacocum-resistance level | 1.3×10-5 |
|---|---|
| Degree of freedom | 4-AXIS(ll AC-servo controlle） |
| Working range「S AXIS」(deg) | +/-290 +/-150 |
| Working range「Z AXIS」(㎜) | +/-290 |
| Maximum speed「S AXIS」(deg/s) | 100/115 |
| Maximum speed「Z AXIS」(㎜/s) | 160～350 |
| Maximum speed「θ1 AXIS」(deg/s) | 100 |
| Maximum speed「Repeatabilly」(㎜) | ±0.5 |
| Maximum speed「Noise generation」(㎜) | 80 or less |
| Maximum speed「Manipulator weight」(㎜) | 100 |
| Maximum speed「Glass size」(㎜) | ～1500×925 t=0.4～0.7 1700×1100 |
| Handling Company | NIDEC SANKYO |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
