Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR8651 Series
NIDEC INSTRUMENTS CORPORATION
4.5 to 6 generation mother glass substrate transfer robot
- characteristics：
- Arm drive system. Realization of minimum turning radius
- Contact information for product inquiry
- Contact Us
Product data
Basic information
| Degree of vacuum | 1.3×10-5 Pa or less |
|---|---|
| Operating range R axis | -565～+565mm |
| Operating Z axis | Within 820mm |
| Operating range θ axis | -185～+140° |
| Maximum speed R axis *1 | 1.22rad/sec |
| Maximum speed Z axis *1 | 350mm/sec |
| Maximum speed θ axis *1 | 2.09rad/sec |
| Repeat position accuracy | ±0.2mm |
| Maximum payload accuracy | 65kg/1Arm(Including robot hand) |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
