SR8220

Our industrial robotsutilize our own servo motors anddevice cotrolling software to suppress vibration,to realize stableand fast handling under highly cleanenvironment.

characteristics:

・Dual arm version insure max.throughput・High-speed replacement of a wafer and a double pick are possible.・Excellent straight line accuracy・It can combine a variation of a Z axis height with suitable for a various equipments・Compatible to handle 2 to 8 inch wafers, also capable to use 12 inch

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